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1

Study on linearization of silicon capacitive pressure sensors

Xinxin Li, Minhang Bao, Shaoqun Shen

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 592 KB

english, 1997

2

A novel technique for measuring etch rate distribution of Si

Heng Yang, Minhang Bao, Shaoqun Shen, Xinxin Li, Dacheng Zhang, Guoyin Wu

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 434 KB

english, 2000

3

Over-range capacity of a piezoresistive microaccelerometer

Hong Chen, Shaoqun Shen, Minhang Bao

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 218 KB

english, 1997

4

Uniaxial Tensile Properties of Atherosclerotic Carotid Artery After Mobilization of Pushing on Qiao-Gong: A Safety Study Using an Animal Model of Carotid Atherosclerosis

Qi, Ji, Zhang, Shaoqun, Zhang, Lei, Ping, Ruiyue, Ping, Kaike, Ye, Da, Shen, Honggui, Chen, Yili, Li, Yikai

Journal:

Journal of Manipulative and Physiological Therapeutics

Year:

2018

Language:

english

File:

PDF, 531 KB

english, 2018

5

Analysis on twin-mass structure for a piezoresistive accelerometer

Shen Shaoqun, Chen Jian, Bao Minhang

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 628 KB

english, 1992

6

A micromachined piezoresistive angular rate sensor with a composite beam structure

Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Deren Lu

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 501 KB

english, 1999

7

Effects of electrostatic forces generated by the driving signal on capacitive sensing devices

Minhang Bao, Heng Yang, Hao Yin, Shaoqun Shen

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 312 KB

english, 2000

8

A novel micromachining technology for multilevel structures of silicon

Minhang Bao, Xinxin Li, Shaoqun Shen, Hong Chen

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 978 KB

english, 1997

9

Maskless etching of three-dimensional silicon structures in KOH

Xinxin Li, Minhang Bao, Shaoqun Shen

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 673 KB

english, 1996

10

A piezoresistive accelerometer with a novel vertical beam structure

Hong Chen, Minhang Bao, Haijun Zhu, Shaoqun Shen

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 536 KB

english, 1997

11

A novel bulk micromachined gyroscope based on a rectangular beam-mass structure

Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 170 KB

english, 2002

12

Two-dimensional excitation operation mode and phase detection scheme for vibratory gyroscopes

Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 155 KB

english, 2002

13

langle100rangle composite beam structure formed by masked-maskless etch of silicon

Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, Weiyuan

Journal:

Journal of Micromechanics and Microengineering

Year:

1999

Language:

english

File:

PDF, 296 KB

english, 1999

14

[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A micromechanical structure eliminating lateral effect of silicon accelerometer

Bao Minhang,, Chen Jian,, Shen Shaoqun,

Year:

1991

File:

PDF, 185 KB

1991

15

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Single-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology

Yang, Heng, Ren, Jianjun, Bao, Minhang, Shen, Shaoqun, Chang, Shih-Chia, Pang, Stella W.

Year:

1997

File:

PDF, 399 KB

1997

16

SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Experiments and a new model on damping in rare air

Yin, Hao, Bao, Minhang, Yang, Heng, Shen, Shaoqun, Xiong, Bin, Tien, Norman C., Huang, Qing-An

Year:

2001

Language:

english

File:

PDF, 170 KB

english, 2001

17

SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Phase detection scheme of vibratory gyroscope by 2D driving operation

Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun, Xiong, Bin, Tien, Norman C., Huang, Qing-An

Year:

2001

Language:

english

File:

PDF, 129 KB

english, 2001

18

[IEEE 9th International Symposium on Electrets (ISE 9) Proceedings - Shanghai, China (25-30 Sept. 1996)] 9th International Symposium on Electrets (ISE 9) Proceedings - The charge dynamics of thermally wet grown SiO/sub 2/ electret by corona charging method with constant grid current

Lin Huamao,, Xia Zhongfu,, Shen Shaoqun,, Zhang Hongyan,, Cao Yang,, Zhu Jianwei,

Year:

1996

Language:

english

File:

PDF, 287 KB

english, 1996

19

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Composite cantilever beam-mass structure gyroscope by a novel etching technology

Li, Xinxin, Bao, Minhang, Yang, Heng, Shen, Shaoqun, Wang, Weiyuan, Smith, James H.

Year:

1998

Language:

english

File:

PDF, 626 KB

english, 1998

20

A pressure transducer with a single-sided multilevel structure by maskless etching technology

Heng Yang, Shaoqun Shen, Minhang Baoa, Jianjun Ren, Jiaying Shen, Deren Lu

Journal:

Year:

1998

Language:

english

File:

PDF, 311 KB

english, 1998

21

[IEEE 9th International Symposium on Electrets (ISE 9) Proceedings - Shanghai, China (25-30 Sept. 1996)] 9th International Symposium on Electrets (ISE 9) Proceedings - Chemical surface modification on SiO/sub 2/ electret by DCDMS

Lin Huamao,, Zhang Hongyan,, Xia Zhongfu,, Shen Shaoqun,, Zhu Jianwei,

Year:

1996

Language:

english

File:

PDF, 303 KB

english, 1996

22

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Dual beam-mass structure gyroscope micromachined by deep RIE process

Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun, Peeters, Eric, Paul, Oliver

Year:

2000

Language:

english

File:

PDF, 372 KB

english, 2000

23

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A piezoresistive accelerometer with a novel vertical beam structure

Hong Chen,, Minhang Bao,, Haijun Zhu,, Shaoqun Shen,

Year:

1997

Language:

english

File:

PDF, 421 KB

english, 1997

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